Semiconductor/FPD
Industry
 
YMS
In-line tool
  MiDEWS
  DataManager
  MaskManager
  MicTerm
  InBAS
Imaging
Statistical Analysis
& Quality Management

(ADC,DSA,DPA) - Mirero Defect Early Warning System
Most important competitiveness of semiconductor industry is productivity through decrease TAT as to make quickly yield ramp
up and to remove a systematic yield loss factor.
So, the purpose of this system is yield enhancement as service systematic defect detection for prevent yield accident,manage
and detect yield loss factor as extend inspection data by own software algorithm and remove review loss through skip unnecessary review defect.


1. Purpose of system


2. Service Description
    SRA (Shot Repeat Analysis Service)
    SCB (Size Binning & Conversion Service)
    ADC (Auto Defect Classification Service)
    DPA (Defect Pattern Analysis Service)
    Auto DSA (Auto Defect Source Analysis Service)
    Smart Review (Review Sample planning Service)


System Application
Download Brochure
MiDEWS (PDF, 85KB)